Enhanced Open Innovation : New Innovation to Open New Paradigm
Speaker: Dr. MANABU TSUJIMURA, Chief Executive Officer, Ebara Corporation
Time: 9:30-11:30, Tuesday, July 3, 2018
The history of miniaturization of semiconductors, which has been supported by Dennard’s theory and developed in accordance with Moore’s law, has entered the new era of Å, and the market is expected to grow explosively beyond the conventional market mechanisms. Semiconductor technology has always faced developing technical challenges, each of which has been overcome by a newly proposed innovation. Even now, a sense of stagnation about the future technology is pervasive. On the other hand, the market is expected to grow explosively due to a shift from single driver technology, including PCs and mobile phones, to multi-driver technology including ICAC5 (IoT, cloud, AI, cars, and 5G). This paper covers a method of development through Enhanced Open Innovation, which is an advanced form of Open Innovation, as a method for overcoming the sense of stagnation about the future technology and responding to the explosively growing market. In preparation for the paradigm revolution of semiconductors that is expected to occur in 2030, CMP needs to be advanced in terms of hardware as well as software. Manabu’s principle "Semiconductor device technology is immortal as long as there are human desires" is about to be proved.
Dr. Manabu Tsujimura is CTO of Ebara Corporation, who has been worked at Ebara Corporation since 1974 and was a president of Precision Machinery Company from 2011 to 2015. He received a Dr. degree in Engineering field from Tokyo Metropolitan University. He is Fellow of JSME (The Japan Society of Mechanical Engineerings). He has contributed to academies and associations such as: Visiting Professor of Clarkson University (USA), Hanyang University (Korea), Sungkyunkwan University (Korea), National Taiwan University of Science and Technology(Taiwan), Fudan University(China). Chair of SEAJ (Semiconductor Equipment Association of Japan), Vice chair of JVIA (Japan Vacuum Industry Association). He has more than 100 patents, and has written more than 100 papers.