Non invasive 3D characterization of nanomaterials and nanodevices with a novel multiscale x-ray CT

 (computed tomography system)

主讲人:  S H Lau

Vice President of marketing for Xradia Inc, based in California 

3月28日（周五）13:30-14:30     邯郸净化楼B213会议室

Abstract:

Tremendous advances have been made in the field of nanomaterials, nanophotonics, and nanoelectronics devices. While conventional imaging tools such as optical microscopy, electron microscopy and AFM are adequate to visualize surface structures of these materials, it has been difficult to accurately characterize their internal 3D arrays, porosity,  interconnects and functionalities. To do that, destructive sample preparation through physical or chemical cross section must be performed. This approach can be tedious and introduces artifacts, and at times may be impossible. Optical and confocal microscopy suffers from diffraction limits with spatial resolution no better than 200 nm. While electron microscopy can achieve spatial resolution in the nm scale, sample preparation can be very elaborate, including the need to be compatible with high vacuum and be electrically conductive. Moreover, conventional imaging modalities will not easily characterize functional and structural changes of materials and sensors in 3D at the multiscale level- with lengthscale from mm to nanoscale resolution.

We will describe a novel multiscale 3D x-ray tomography system for high resolution imaging of nanomaterials, nanophotonics and nanoelectronics with mm to sub 50 nm spatial resolution and which is capable of imaging samples with dimensions from several cm to microns.  One of the most powerful advantages against other currently used metrology approaches is that such imaging can be done without physical or chemical deprocessing and it does not matter if the materials are conductive, high Z or soft low Z polymers. Several examples in electronics, from package to die level IC failure analysis; through Si-via, characterization of nanophotonics, nanomaterials, carbon fibers and  nanosensors, such as Fuel cells ( SOFC and PEM) will be illustrated

Biography: